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Technology

Anodic bonding

Spin-coater and hot-plate

Thermic oxidation

Double-side maskaligner AL6-2

Thermic evaporation

KOH-etch system

Clean room lab

A clean room lab with appropriate equipment is avaiable for research and practical courses. The equipment allows to process 4 inch silicon wafer.

Furthermore glas and ceramic wafer can be processed.

Polarisation of PVDF

Wind tunnel

Wafer saw

Further Equipment

laserinterferometric vibrometer
wind tunnel
wafer saw
PCs
high voltage power supplies
data loggers
function generators
oscilloscope
LCR-meter
voltmeters
etching bath for PCB structuring
...